Field of the Invention The present invention relates to spinner installations used in photo processes in semiconductor device manufacturing processes, and more particularly to spinner installations having an acyclic air conditioning system for controlling ammonia concentrations. G03F7/162- Coating on a rotating support, e.g.G03F7/16- Coating processes Apparatus therefor.comprising photoresists Apparatus specially adapted therefor printing surfaces Materials therefor, e.g. photolithographic, production of textured or patterned surfaces, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES MATERIALS THEREFOR ORIGINALS THEREFOR APPARATUS SPECIALLY ADAPTED THEREFOR G03F- PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g.G03- PHOTOGRAPHY CINEMATOGRAPHY ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES ELECTROGRAPHY HOLOGRAPHY.238000004519 manufacturing process Methods 0.000 description 1.125000002015 acyclic group Chemical group 0.000 description 1.OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4. 238000004378 air conditioning Methods 0.000 abstract description 15.238000007599 discharging Methods 0.000 claims description 2.239000004065 semiconductor Substances 0.000 claims description 3.QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 29.239000000126 substance Substances 0.000 claims abstract description 34.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by 윤종용, 삼성전자 주식회사 filed Critical 윤종용 Priority to KR1020000034910A priority Critical patent/KR20020000355A/en Publication of KR20020000355A publication Critical patent/KR20020000355A/en Links Inventor 이순영 박영호 Original Assignee 윤종용 삼성전자 주식회사 Priority date (The priority date is an assumption and is not a legal conclusion. Google Patents KR20020000355A - Spinner equipment having one-path type air conditioner system We offer a wide variety of top-quality multi-room mini split air conditioners-and they’re all designed for durability and performance.KR20020000355A - Spinner equipment having one-path type air conditioner system Our indoor multi-zone mini split systems come in both ductless and ducted varieties, with many different combination options that allow you to create the ideal and total home comfort system for most new and retrofit projects. In a multi-room split system, a single multi circuit outdoor unit is attached to multiple indoor units that come in a variety of capacities and designs, which can me mixed and matched within a single set to meet the load requirements and other design constraints for each zone. Pioneer® multiple-zone mini split systems are available in two, three, four and five zone versions and with various capacities, for multi room settings where independent and full zone control is required for each of the rooms. Quantum Free-Match Series Ductless and Ducted Inverter++ Multi-Zone Split Components and Kits (2/3/4/5 Zone)
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